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M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI MF1811-1109 (technical revision)
M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI MF1811-1109 (technical revision)
$115.50
Description
SEMI MF1811-1109 (technical revision)
SEMI M8-0703 (technical revision)
SEMI E113-0306 (technical revision)
and specimen surface preparation specified in this Test Method are to be preferred for all referee measurements on bulk silicon wafers
M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI MF1811-1109 (technical revision)global Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline
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