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C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI M61-0612 (Reapproved 0319)
C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI M61-0612 (Reapproved 0319)
$115.50
Description
SEMI M61-0612 (Reapproved 0319)
and alignment
SEMI C99-0320 (first published)
本ガイドは，MEからのF-GHG排出特性評価に適用される。
C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI M61-0612 (Reapproved 0319)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20033 (C4F8) (C4F8) Referenced SEMI Standards None.
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