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E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces SEMI C40-1110 (Reapproved 0618)

$115.50

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SEMI C40-1110 (Reapproved 0618)

• Helium (He)

SEMI E54-1296 (technical revision)

should also be utilized

E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces SEMI C40-1110 (Reapproved 0618)global Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers

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