MF152900 - SEMI MF1529 - Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure Revision:SEMI MF1529-1110 - Superseded SEMI D51 — Specification for

SEMI D51 — Specification for Handshake Protocol of Single Substrate for Handling off/on Tool in FPD Production

SEMI E89等で網羅しており，統計的な考察を議論することは行わない。

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The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the VPG as it appears from the network interface

MF152900 - SEMI MF1529 - Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure Revision:SEMI MF1529-1110 - Superseded SEMI D51 — Specification forThe sheet resistance of epitaxial, implanted, diffused or deposited films is an important materials acceptance and process control parameter. The uniformity across a wafer of the sheet resistance resulting from any of these processes is important for the equivalence of performance of devices or circuits made from various regions of the wafer. This Test Method uses a four point probe in a manner different from that of other ASTM methods for the